海阔凭鱼跃 沈海军的航空与纳米 ...分享 http://blog.sciencenet.cn/u/沈海军 同济大学 教授Email:SHJ@tongji.edu.cn /SHJ@nuaa.edu.cn 版权所有

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一组纳米美图

已有 9732 次阅读 2008-10-15 08:45 |个人分类:纳米科技


Title: The Rose

Description: Attempt to micro-mill a hole, 200 µm diameter, in black -poly(methylmethacrylate)

COC/Topas® with carbon particles). The milling speed was to high and the polymer melted.

Magnification: scale on the picture
Instrument: LEO 1500 SEM-EDX at DANCHIP, Denmark

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies S/A, Denmark

Title: Black Moon

Description: Hole milled in black-poly(methylmethacrylate) (i.e. COC/Topas® & carbon particles) with a 200 µm tool.

Magnification: scale on the picture
Instrument: LEO 1500 SEM-EDX at DANCHIP, Denmark

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies A/S, Denmark

Title: Ice Age

Description: Clusters of Fe2O3 nanoparticles micro-contact printed on poly-Si microelectrodes.

Magnification: scale on the picture
Instrument: Philips XL 30 ESEM-FEG at CSEM S/A, Switzerland

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies A/S, Denmark


Title
: Mountain Top

Description: Used micro-mill tool. The tool initial diameter was 200 µm.

Magnification: Scale on the picture
Instrument: Jeol JSM 5500 LV SEM at DANCHIP, Denmark

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies A/S, Denmark


Title
: Landscape @ the Microscale

Description: Carbon nanotubes grown by electric field assisted chemical vapor deposition on poly-Si microelectrodes.

Magnification: scale on the picture
Instrument: Philips XL 30 ESEM-FEG at CSEM S/A, Switzerland

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies A/S, Denmark


Title
: Nano Bridge

Description: A single multi-walled carbon nanotube suspended between gold microelectrodes. A voltage is applied between the middle microelectrode and the outer ones with the nanotube. The middle microelectrode is grounded and therefore appears darker in the micrograph.

Magnification: scale on the picture
Instrument: LEO 1500 SEM-EDX at DANCHIP, Denmark

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies A/S, Denmark

Title: Spaghetti à la Nano

Description: Gold microelectrodes approaching a single multi-walled carbon nanotube which extends in the open space from a bundle.

Magnification: scale on the picture
Instrument: E-SEM FEI XL 30, FEG at Haldor Topsøe A/S, Denmark

Submitted by: Ramona Mateiu
Affiliation: SCF-Technologies A/S, Denmark

Title: PMMA Ruins

Description: X-ray lithography of a 10 µm PMMA film, tilted under ± 45°. Remaining columns after 1st step of exposure are cut in pieces with 2nd exposure, those remain lying in order like an ancient stone wall.

Magnification: 2000X
Instrument:   M. MIKRONA SEM 525 M (Philips)

Submitted by: Timo Mappes
Affiliation: Forschungszentrum Karlsruhe GmbH, Germany

Title: German Ordered Collapse

Description: X-ray lithography of a 5 µm PMMA film, 5625 columns with Ø 800 nm. While drying after wet development the columns are torn to each other due to capillary forces and stay in semi-ordered fields.

Magnification: 740X
Instrument:   M. MIKRONA SEM 525 M (Philips)

Submitted by: Timo Mappes
Affiliation: Forschungszentrum Karlsruhe GmbH, Germany

Title: Micro Viagra® Test Arrays

Description: X-ray lithography of a 10 µm SU-8 film, fields of columns with different diameter and pitch. Patterns as indicators for the limit of stability.

Magnification: 1700X
Instrument:   M. MIKRONA SEM 525 M (Philips)

Submitted by: Timo Mappes
Affiliation: Forschungszentrum Karlsruhe GmbH, Germany

Title: The Spire

Description: Electrochemical etching of a tungsten wire produces an extremely fine probe and a spire for pico-parishioners.

Magnification: 33X
Instrument:   Leo 1530 SEM

Submitted by: Richard Stallcup, PhD
Affiliation: Zyvex Corporation, Richardson, Texas, USA

Title: Not an Escher

Description: Accidental undercutting of square pits, during cryo etch in Si, resulting in a freestanding cage structure

Magnification: 800 x
Instrument:  FEI XL30 SFEG

Submitted by: Chris Rétif
Affiliation: FOM-AMOLF, Amsterdam The Netherlands

Title: Letters

Description: Wet etched stamp for nanoimprint lithography. The letters are e-beam written into HSQ (Hydrogen Silsesquioxane) followed by development and a wet etch process with KOH.

Magnification: Scale on the picture
Instrument:  Philips XL30

Submitted by: Michael Häffner
Affiliation: Institute of Applied Physics, University of Tübingen

Title: The Dog

Description: Wet etched stamp for nanoimprint lithography. The letters are e-beam written into HSQ (Hydrogen Silsesquioxane) followed by development and a wet etch process with KOH.

Magnification: Scale on the picture
Instrument:  Philips XL30

Submitted by: Michael Häffner
Affiliation: Institute of Applied Physics, University of Tübingen

Title: Who spilled the milk?

Description:Optical image of quantum trees evolving from quantum dot solution by evaporation.

Magnification: Scale on the picture
Instrument:   AxioCam MR

Submitted by: Yongfeng Mei
Affiliation: Max-Planck Institute for Solid State Research, Stuttgart, Germany.

Title: Who spilled the milk again?

Description:Optical image of quantum trees evolving from quantum dot solution by evaporation.

Magnification: Scale on the picture
Instrument:   AxioCam MR

Submitted by: Yongfeng Mei
Affiliation: Max-Planck Institute for Solid State Research, Stuttgart, Germany.

Title: It is 2006’s nano-Benz logo

Description:AFM image of semiconductor nanochannel ( ~100 nm) network with Benz logo by releasing and bond-back of layers (REBOLA) technology.

Magnification: Scale on the picture
Instrument:  NanoScope

Submitted by: Yongfeng Mei
Affiliation: Max-Planck Institute for Solid State Research, Stuttgart, Germany.

Title: Logos of MNE 2006 Olympic Games

Description: Optical image of semiconductor nanochannel network by releasing and bond-back of layers (REBOLA) technology.

Magnification: Scale on the picture
Instrument:  Axio Cam MR

Submitted by: Yongfeng Mei
Affiliation: Max-Planck Institute for Solid State Research, Stuttgart, Germany.

Title: Satellite map of Nano World

Description: Optical image of semiconductor nanochannel network by releasing and bond-back of layers (REBOLA) technology.

Magnification: Scale on the picture
Instrument:  Axio Cam MR

Submitted by: Yongfeng Mei
Affiliation: Max-Planck Institute for Solid State Research, Stuttgart, Germany.

Title: Who would like to fight with octopus army?

Description: Optical image of semiconductor nanochannel network by releasing and bond-back of layers (REBOLA) technology.

Magnification: Scale on the picture
Instrument:  Axio Cam MR

Submitted by: Yongfeng Mei
Affiliation: Max-Planck Institute for Solid State Research, Stuttgart, Germany.

Title: Fringes

Description:Detail of a deformed polymeric pattern, after NanoImprint lithography

Magnification: 25 k X
Instrument: SEM LEO 1530  

Submitted by: Irene Fernández
Affiliation: CNM, IMB - Barcelona

Title: Giza

Description:Overetched structures in a silicon wafer, after TMAH etching

Magnification: 3.14 k X
Instrument: SEM LEO 1530

Submitted by: Irene Fernández
Affiliation: CNM, IMB - Barcelona

Title: Spider

Description:Deformed polymeric pattern, after NanoImprint lithography

Magnification: 12.38 k X
Instrument: SEM LEO 1530

Submitted by: Irene Fernández
Affiliation: CNM, IMB - Barcelona

Title: Surprise

Description: Some remaining resist after cleaning a sample with acetone

Magnification: 140 X
Instrument: SEM LEO 1530

Submitted by: Irene Fernández
Affiliation: CNM, IMB - Barcelona

Title: Tulipes

Description: Polymeric pattern, after NanoImprint lithography, with high imprinting and demolding temperature

Magnification: 9.29 k X
Instrument: SEM LEO 1530

Submitted by: Irene Fernández
Affiliation: CNM, IMB - Barcelona

Title: A piece of Nano- Mon Chéri

Description: Porous Si after selective chemical treatment.

Magnification: 100,000
Instrument:   Carl Zeiss, LEO 1540 XB

Submitted by: E. Horváth
Affiliation: HAS, Research Institute for Technical Physics and Materials Science

Title: Snow Frost

Description: 300 nm silicon balls on Si surface

Magnification: 10,000
Instrument:   Carl Zeiss, LEO 1540 XB

Submitted by: E. Horváth
Affiliation: HAS, Research Institute for Technical Physics and Materials Science

Title: Pt Ion Detection

Description: Topo image of Pt ion adsorption (mesa-zone) and gold nanoparticles; mesa-zone is intaglio, however this zone is relievo in LFM image because of chemical properties. In addition, aggregated organic materials is not appeared in LFM image on the same reason.

Instrument: XE-100, PSIA (AFM)  

Submitted by: Sung Koo Kang
Affiliation: School of Chemical and Biological Engineering, Seoul National University

Title: Nano Muffin

Description: Porous Si after selective chemical treatment

Magnification: 100,000
Instrument:   Carl Zeiss, LEO 1540 XB

Submitted by: E. Horváth
Affiliation: HAS, Research Institute for Technical Physics and Materials Science

Title: Muffins

Description: Optimization of technology for solder bumps.

Magnification: 5.7 kX
Instrument:   Leo 1530 SEM

Submitted by: Gemma Rius
Affiliation:IMB-CNM-CSIC, Spain

Title: The Wave

Description: Optical lithography on SU-8 resist after development.

Magnification: 1.81 kX
Instrument:   Leo 1530 SEM

Submitted by: Gemma Rius
Affiliation:IMB-CNM-CSIC, Spain

Title: Little Worm

Description: Amorphous carbon nanotube grown on a metal surface.

Magnification: 398. kX
Instrument:   Leo 1530 SEM

Submitted by: Gemma Rius
Affiliation:IMB-CNM-CSIC, Spain

Title: Nano Worm

Description: Cross-section of electrodeposited gold nanowires on Si substrate.

Magnification: 70000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Nano Crocodile

Description: A part of Au nanowire fabricated by templated electrodeposition.

Magnification: 306000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Time Tunnel

Description: Anisotropic electrochemical etched Si hole.

Magnification: 10000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Broccoli

Description: Patterned Si substrate after electrochemical etching and cleaning.

Magnification: 6500x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Nano Snake

Description: Bowing of a gold nanowire.

Magnification: 124000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Black Spade Array

Description: Nanowire array fabricated on SOI wafer by using interference lithography and isotropic HF etching.

Magnification: 40000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Silicon Paper

Description: (110) Si structure after oxidation and Hf etching formed very thin Si nanofins.

Magnification: 35000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: Honeycomb

Description: Photoresist structure obtained by interference lithography.

Magnification: 33000x
Instrument:  JEOL JSM 6340

Submitted by: Ran Ji
Affiliation: Max-Planck-Institute of microstructure physics, Germany

Title: More than a Football Club

Description: AFM topographic image of a local oxidation performed using AFM on a silicon wafer.

Magnification:
Instrument:   Dimension 3100, Veeco

Submitted by: Cristina Martin Olmos
Affiliation:IMB-CNM-CSIC, Spain



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