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Experimental Parameters written in TIFF images from FEI SEM.

已有 3512 次阅读 2013-5-26 08:40 |个人分类:化学|系统分类:科研笔记| SEM, FEI

FEI扫描电子显微镜所得TIFF图片中所含实验参数信息

Experimental Parameters written in TIFF images from FEI SEM (Scanning Electronic Microscope).

FEIの走査型電子顕微鏡を利用した貰ったTIFFで写真の情報

===============


Use Vim or notepad opening the TIFF images, and check the terminal plain text.


Stage Tilt angle; unit, rad

e.g., TiltCorrectionAngle=0.488997 (i.e., 28 deg)


Scan Rotation angle; unit, rad

e.g., ScanRotation=-0.248 (i.e., -14 deg, inverse hour)


Work Distance; unit, meter

e.g., WorkingDistance=0.00176491 (i.e., 1.8 mm)

===============================

Example:

Date=05/22/2013


Time=12:55:40 PM


User=support


UserText=Magellan400L


UserTextUnicode=4D006100670065006C006C0061006E003400300030004C00




[System]


Type=SEM


Dnumber=D9372


Software=4.1.4.2010


BuildNr=2010


Source=FEG


Column=Elstar


FinalLens=Elstar


Chamber=XL30SB


Stage=


Pump=TMP


ESEM=no


Aperture=AVA


Scan=PIA 2.0


Acq=PIA 2.0


EucWD=0.004


SystemType=Magellan(TM) 400L


DisplayWidth=0.373


DisplayHeight=0.303




[Beam]


HV=1000


Spot=-4


StigmatorX=-0.519744


StigmatorY=0.089469


BeamShiftX=-4.83139e-007


BeamShiftY=-5.02403e-007


ScanRotation=-0.248229


ImageMode=Normal


Beam=EBeam


Scan=EScan




[EBeam]


Source=FEG


ColumnType=Elstar


FinalLens=Elstar


Acq=PIA 2.0


Aperture=AVA


ApertureDiameter=4.53e-005


HV=1000


HFW=1.492e-006


VFW=1.28802e-006


WD=0.00176491


BeamCurrent=6.25e-012


TiltCorrectionIsOn=no


DynamicFocusIsOn=no


ScanRotation=-0.248229


LensMode=Immersion


SemOpticalMode=


ImageMode=Normal


SourceTiltX=0.0046875


SourceTiltY=-0.00976563


StageX=0.00420305


StageY=0.00737603


StageZ=0.00178479


StageR=-1.02094


StageTa=-1.27551e-005


StageTb=0


StigmatorX=-0.519744


StigmatorY=0.089469


BeamShiftX=-4.83139e-007


BeamShiftY=-5.02403e-007


EucWD=0.004


EmissionCurrent=0.000271042


TiltCorrectionAngle=-1.80698e-005


PreTilt=0


WehneltBias=


BeamMode=U-Beam




[GIS]


Number=0




[Scan]


InternalScan=true


Dwelltime=1e-007


PixelWidth=1.45703e-009


PixelHeight=1.45703e-009


HorFieldsize=1.492e-006


VerFieldsize=1.28802e-006


Average=0


Integrate=0


FrameTime=25.6726




[EScan]


Scan=PIA 2.0


InternalScan=true


Dwell=1e-007


PixelWidth=1.45703e-009


PixelHeight=1.45703e-009


HorFieldsize=1.492e-006


VerFieldsize=1.28802e-006


FrameTime=25.6726


LineTime=0.028305


Mainslock=Off


LineIntegration=255


ScanInterlacing=1




[Stage]


StageX=0.00420246


StageY=0.00737566


StageZ=0.00178479


StageR=-1.02094


StageT=-1.27551e-005


StageTb=0


SpecTilt=0


WorkingDistance=0.00176491




[Image]


DigitalContrast=1


DigitalBrightness=0


DigitalGamma=1


Average=0


Integrate=0


ResolutionX=1024


ResolutionY=884


ZoomFactor=1.0


ZoomPanX=0.5


ZoomPanY=0.5


MagCanvasRealWidth=0.29840


MagnificationMode=2


ScreenMagCanvasRealWidth=0.29840


ScreenMagnificationMode=2


PostProcessing=None




[Vacuum]


ChPressure=4.6367e-005


Gas=


UserMode=High vacuum


Humidity=




[Specimen]


Temperature=




[Detectors]


Number=1


Name=TLD


Mode=SE




[TLD]


Contrast=100


Brightness=13.67


Signal=SE


ContrastDB=82.5557


BrightnessDB=-8.71925


SuctionTube=70


Mirror=-15


MinimumDwellTime=1e-007




[Accessories]


Number=1


Name0=LoadLock




[EBeamDeceleration]


ModeOn=Off


LandingEnergy=1000


ImmersionRatio=1


StageBias=0




[PrivateFei]


BitShift=0


DataBarSelected=DateTime HV curr WD mag HFW dwell Label MicronBar


DataBarAvailable=HV srot frame dwell curr WD mag HFW x y tilt filter det DateTime mode zoom imRatio bias beamMode Label MicronBar


TimeOfCreation=22.05.2013 12:55:40


DatabarHeight=59




[HiResIllumination]


BrightFieldIsOn=


BrightFieldValue=


DarkFieldIsOn=


DarkFieldValue=





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