1

半导体制造

243

5.3%

2

电热与等离子体

37

1.1%

3

电气元件和结构部件

47

0.8%

4

材料化学与纳米

27

0.5%

5

半导体组件与集成电路

10

0.4%

6

半导体元件

22

0.4%

7

半导体零配件

3

0.3%

8

光学和摄影

12

0.2%

9

分离和混合加工作业

12

0.2%

10

控制器和运算器CPU

1

0.1%

11

计算机安全

1

0.1%

12

基本电子电路

1

0.1%

13

材料测试

3

0.1%

14

光电辐射测量与核物理

3

0.1%

15

物理信号和控制

3

0.1%

16

包装和储运

3

0.1%

17

计算机一般零部件

1

0.1%

18

成型加工作业

5

0.0%

19

计算机应用与软件工程

1

0.0%

20

一般机械和武器

2

0.0%

1

101937727

ETCHING METHOD

2

101938441

METHOD FOR FORMING A SEMICONDUCTOR DEVICE

3

101938905

METHOD OF SLIMMING RADIATION-SENSITIVE MATERIAL LINES IN LITHOGRAPHIC   APPLICATIONS

4

101939161

PLATING METHOD, PLATING SYSTEM AND STORAGE MEDIUM

5

101939166

SUBSTRATE PROCESSING SCRUBBER, SUBSTRATE PROCESSING APPARATUS AND   SUBSTRATE PROCESSING METHOD

6

101940603

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE, AND STORAGE   MEDIUM

7

101941766

SUBSTRATE PROCESSING METHOD AND RECORDING MEDIUM

8

101942447

SUBSTRATE PROCESSING METHOD, STORAGE MEIDUM STORING COMPUTER PROGRAM FOR   IMPLEMENTING SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

9

101942587

LIQUID PROCESSING APPARATUS

10

101942613

PROCESSING APPARATUS AND PROCESSING METHOD

11

101943181

SUBSTRATE TEMPERATURE CONTROL APPARATUS AND SUBSTRATE PROCESSING   APPARATUS

12

101943691

FILM FORMING APPARATUS AND SHOWER HEAD

13

101943693

SUBSTRATE PROCESSING APPARATUS

14

101943754

MICROWAVE PLASMA SOURCE AND MICROWAVE PLASMA PROCESSING APPARATUS

15

101944202

SUBSTRATE TRANSPORTATION METHOD AND PROCESSING SYSTEM

16

101945566

TREATMENT LIQUID SUPPLY DEVICE, TREATMENT LIQUID SUPPLY METHOD AND   COMPUTER STORAGE MEDIUM

17

101945592

MAGNETIZING APPARATUS AND MAGNETIZING METHOD

18

101945609

SUBSTRATE PROCESSING METHOD FOR SELECTIVE FILM FORMATION FOR RAISED AND   RECESSED FEATURES USING DEPOSITION AND ETCHING PROCESSES

19

101946094

TEMPERATURE CONTROL DEVICE, PROCESSING DEVICE, AND TEMPERATURE CONTROL   METHOD

20

101946124

LOWER ELECTRODE OF DRAM CAPACITOR AND MANUFACTURING METHOD THEREOF

21

101946144

SUBSTRATE PROCESSING METHOD

22

101947212

DRIVE DEVICE AND SUBSTRATE PROCESSING SYSTEM

23

101949722

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE   MEDIUM

24

101950548

MULTI-LAYER FILM ETCHING METHOD AND PLASMA PROCESSING APPARATUS

25

101950565

METHOD AND APPARATUS FOR INCREASED RECIRCULATION AND FILTRATION IN A   PHOTORESIST DISPENSE SYSTEM

26

101951054

METHOD FOR REFERENCE IMAGE GENERATING ON SUBSTRATE, METHOD FOR   INSPECTION OF DEFECTS ON SUBSTRATE, APPARATUS FOR REFERENCE IMAGE GENERATING   ON SUBSTRATE, UNIT FOR INSPECTION OF DEFECTS ON SUBSTRATE AND COMPUTER-READABLE   RECORDING MEDIUM

27

101952444

FLOATING SUBSTRATE COATING APPARATUS

28

101953423

PRODUCTION EFFICIENCY IMPROVEMENT SYSTEM, PRODUCTION EFFICIENCY   IMPROVEMENT DEVICE AND PRODUCTION EFFICIENCY IMPROVEMENT METHOD

29

101953464

INSPECTION APPARATUS, INSPECTION METHOD, AND FUNCTIONAL LIQUID DROPLET   EJECTION APPARATUS

30

101953934

JOINING METHOD AND JOINING SYSTEM

31

101954475

PRODUCTION PROCESSING SYSTEM, CONTROL DEVICE FOR PRODUCTION PROCESSING,   METHOD FOR CONTROLLING PRODUCTION PROCESSING AND CONTROL PROGRAM FOR   PRODUCTION PROCESSING

32

101955062

SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND   SEMICONDUCTOR MANUFACTURING APPARATUS

33

101956478

ANTENNA UNIT FOR INDUCTIVELY COUPLED PLASMA, INDUCTIVELY COUPLED PLASMA   PROCESSING APPARATUS AND METHOD THEREFOR

34

101956740

DRYING APPARATUS AND DRYING METHOD

35

101957348

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

36

101957911

PLASMA PROCESSING APPARATUS

37

101959108

FILM-FORMING METHOD, COMPUTER STORAGE MEDIUM, AND FILM-FORMING SYSTEM

38

101959183

METHOD OF DEPOSITING DIELECTRIC FILMS USING MICROWAVE PLASMA

39

101960112

ADAPTIVE RECIPE SELECTOR

40

101960120

PRETREATMENT METHOD AND CARBON NANOTUBE FORMATION METHOD

41

101961988

SUBSTRATE PROCESSING APPARATUS, METHOD FOR DETECTING VERTICAL POSITION   OF LIFT PIN, METHOD FOR ADJUSTING VERTICAL POSITION OF LIFT PIN, AND METHOD   FOR DETECTING ABNORMALITY OF LIFT PIN

42

101963954

TRANSFORMER, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD

43

101965455

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

44

101965957

METHOD FOR FORMING COPPER FILM

45

101967490

ION ENERGY ANALYZER, METHODS OF ELECTRICAL SIGNALING THEREIN, AND   METHODS OF MANUFACTURING AND OPERATING THE SAME

46

101967503

SUBSTRATE TREATMENT METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE   TREATMENT SYSTEM

47

101967940

SUBSTRATE TRANSFERRING APPARATUS FOR SUBSTRATE PROCESSING SYSTEM

48

101968800

HEAT TREATMENT APPARATUS

49

101969599

SUBSTRATE PROCESSING APPARATUS, ADJUSTMENT METHOD AND STORAGE MEDIUM

50

101969611

PLASMA PROCESSING APPARATUS

51

101970362

RADIO FREQUENCY POWER COUPLING SYSTEM UTILIZING MULTIPLE RF POWER   COUPLING ELEMENTS FOR CONTROL OF PLASMA PROPERTIES

52

101970844

LIQUID PROCESSING APPARATUS

53

101971098

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING SYSTEM, SUBSTRATE CLEANING   METHOD AND STORAGE MEDIUM

54

101971773

SUBSTRATE PROCESSING APPARATUS

55

101972148

ORGANIC DEVICE MANUFACTURING METHOD AND ORGANIC DEVICE MANUFACTURING   APPARATUS

56

101973016

DRYING APPARATUS AND DRYING METHOD

57

101973216

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIUM   FOR LIQUID PROCESSING

58

101973233

ELECTRONIC DEVICE, MANUFACTURING METHOD THEREOF, MANUFACTURING APPARATUS   THEREOF

59

101973234

SUBSTRATE TRANSFER SYSTEM AND HEAT TREATMENT APPARATUS USING SAME

60

101974267

PLASMA PROCESSING APPARATUS

61

101974268

PLASMA PROCESSING APPARATUS

62

101974663

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

63

101974691

PLASMA PROCESSING APPARATUS

64

101974715

OXIDE FILM REMOVING METHOD, OXIDE FILM REMOVING APPARATUS, CONTACT   FORMING METHOD, AND CONTACT FORMING SYSTEM

65

101976261

METHODS FOR ADDITIVE FORMATION OF A STT MRAM STACK

66

101976860

COATING APPARATUS, COATING METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

67

101977120

METHOD FOR PREFERENTIAL OXIDATION OF SILICON IN SUBSTRATES CONTAINING   SILICON AND GERMANIUM

68

101977320

PLASMA PROCESSING APPARATUS

69

101977460

TUNGSTEN FILM FORMING METHOD AND STORAGE MEDIUM

70

101978818

FILM FORMING METHOD

71

101979967

DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM

72

101980446

SUBSTRATE PROCESSING APPARATUS

73

101980508

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AND   STORAGE MEDIUM

74

101981361

PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR

75

101982366

ETCHING METHOD AND DEVICE

76

101984327

COATING FILM FORMING APPARATUS

77

101986892

FUNCTIONAL LIQUID EJECTION APPARATUS AND FUNCTIONAL LIQUID EJECTION   POSITION CORRECTING METHOD

78

101986894

DROPLET EJECTION APPARATUS AND DROPLET EJECTION CONDITION CORRECTION   METHOD

79

101987524

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING   METHOD, AND COMPUTER-READABLE STORAGE MEDIUM HAVING SUBSTRATE LIQUID   PROCESSING PROGRAM STORED THEREIN

80

101987582

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

81

101988090

RAW MATERIAL GAS SUPPLY APPARATUS, RAW MATERIAL GAS SUPPLY METHOD AND   STORAGE MEDIUM

82

101988193

METHOD FOR CHEMICAL POLISHING AND PLANARIZATION

83

101989141

FILM FORMING APPARATUS, CLEANING METHOD FOR FILM FORMING APPARATUS AND   RECORDING MEDIUM

84

101989216

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

85

101989227

METHOD OF FORMING INSULATING FILM

86

101989324

FOCUS RING AND SUBSTRATE PROCESSING APPARATUS HAVING SAME

87

101989366

SUBSTRATE PROCESSING EQUIPMENT

88

101989629

SWITCHABLE NEUTRAL BEAM SOURCE

89

101989657

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

90

101989707

NEGATIVE TONE DEVELOPER COMPATIBLE PHOTORESIST COMPOSITION AND METHODS   OF USE

91

101990161

FLUID PROCESSING DEVICE

92

101990653

CONTROL SYSTEM OF TRANSFER APPARATUS AND ADJUSTING METHOD OF ACCESS   POSITION OF TRANSFER APPARATUS

93

101990667

FILM FORMATION DEVICE

94

101991477

MONOLAYER FILM MEDIATED PRECISION FILM DEPOSITION

95

101991550

FILM DEPOSITION METHOD OF SILICON-CONTAINING FILM

96

101991574

FILM FORMING APPARATUS AND GAS INJECTION MEMBER USER THEREFOR

97

101993019

PRETREATMENT METHOD, GRAPHENE FORMING METHOD AND GRAPHENE FABRICATION   APPARATUS

98

101993041

PLASMA PROCESSING APPARATUS

99

101993880

PLASMA-TREATMENT APPARATUS

100

101993975

METHOD FOR SETTING MOUNTING POSITION OF TARGET SUBSTRATE AND FILM   FORMING SYSTEM

101

101994164

SEALING FILM FORMING METHOD

102

101994514

SUBSTRATE PROCESSING APPARATUS

103

101994874

DRYING APPARATUS AND DRYING METHOD

104

101995449

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

105

101996719

METHOD FOR DEPOSITING A PLANARIZATION LAYER USING POLYMERIZATION   CHEMICAL VAPOR DEPOSITION

106

101996772

WAFER INSPECTION DEVICE AND MAINTENANCE METHOD FOR SAME

107

101996986

PLASMA TREATMENT DEVICE

108

101997330

PLASMA PROCESSING APPARATUS AND OPERATION METHOD OF THE SAME

109

101997823

PLASMA PROCESSING APPARATUS

110

101997880

SUBSTRATE PROCESSING APPARATUS, COATING AND DEVELOPING APPARATUS AND   SUBSTRATE PROCESSING METHOD

111

101997932

SUBSTRATE PROCESSING APPARATUS

112

101998520

PLASMA PROCESSING APPARATUS AND PLASMA GENERATING UNIT

113

101998894

LIQUID SUPPLYING APPARATUS

114

101998921

HEAT TREATMENT SYSTEM, HEAT TREATMENT METHOD, AND PROGRAM

115

101998943

POWER MODULATION FOR ETCHING HIGH ASPECT RATIO FEATURES

116

102000318

PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE

117

102000355

PLASMA PROCESSING APPARATUS

118

102000363

PLASMA PROCESSING APPARATUS AND SHOWER HEAD

119

102000797

PLASMA PROCESSING APPARATUS AND METHOD FOR ADJUSTING PLASMA DISTRIBUTION

120

102000802

TEMPERATURE CONTROL SYSTEM, SEMICONDUCTOR MANUFACTURING DEVICE, AND   TEMPERATURE CONTROL METHOD

121

102000841

HEAT TRANSFER MEDIUM SUPPLY SYSTEM AND SUBSTRATE PROCESSING APPARATUS

122

102000852

STAGE AND SUBSTRATE PROCESSING DEVICE

123

102001351

INTERFACE APPARATUS, INTERFACE UNIT, PROBE APPARATUS, AND CONNECTION   METHOD

124

102001708

OPERATION LIMITING DEVICE, OPERATION LIMITING METHOD, AND RECORDING   MEDIUM

125

102002210

METHOD FOR CLEANING SUBSTRATE TRANSFER MECHANISM AND SUBSTRATE   PROCESSING SYSTEM

126

102002215

SUBSTRATE PROCESSING APPARATUS, JIG FOR MAINTENANCE, MAINTENANCE METHOD   OF SUBSTRATE PROCESSING APPARATUS, AND STORAGE MEDIUM

127

102002216

SUBSTRATE LIFTING MECHANISM, SUBSTRATE MOUNTING TABLE, AND SUBSTRATE   PROCESSING APPARATUS

128

102002669

METHOD OF DETOXIFYING EXHAUST PIPE AND FILM FORMING APPARATUS

129

102003058

METHOD FOR PROCESSING BASE BODY TO BE PROCESSED

130

102003108

SUBSTRATE PROCESSING APPARATUS

131

102003585

SUBSTRATE HOLDER AND SUBSTRATE PROCESSING APPARATUS

132

102003591

METHOD AND APPARATUS FOR SELECTIVE FILM DEPOSITION USING A CYCLIC   TREATMENT

133

102004037

MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE PLASMA PROCESSING   METHOD

134

102004046

METHOD OF FORMING TITANIUM OXIDE FILM AND METHOD OF FORMING HARD MASK

135

102004556

BUBBLE REMOVAL METHOD, BUBBLE REMOVAL APPARATUS, DEAERATION APPARATUS   AND COMPUTER-READABLE RECORDING MEDIUM

136

102006059

COVER PLATE FOR DEFECT CONTROL IN SPIN COATING PROCESS

137

102006504

ASSIST EXPOSURE APPARATUS

138

102006519

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

139

102006523

METHOD FOR CRYSTALLIZING GROUP IV SEMICONDUCTOR, AND FILM FORMING   APPARATUS

140

102007041

SEPARATION APPARATUS, SEPARATION SYSTEM AND SEPARATION METHOD

141

102007042

DELAMINATION DEVICE

142

102007043

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

143

102007059

ANTENNA FOR PLASMA GENERATION, PLASMA PROCESSING DEVICE AND PLASMA   PROCESSING METHOD

144

102008475

METHOD FOR FORMING CU WIRING AND METHOD FOR MANUFACTURING SEMICONDUCTOR   DEVICE

145

102009052

COATING FILM FORMING APPARATUS

146

102009078

FILM FORMING METHOD AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR

147

102009083

SUBSTRATE PROCESSING APPARATUS

148

102009369

PLASMA PROCESSING APPARATUS

149

102009372

PLATING PROCESS DEVICE, PLATING PROCESS METHOD, AND STORAGE MEDIUM

150

102009528

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND   NON-TRANSITORY STORAGE MEDIUM

151

102009541

PLASMA PROCESSING DEVICE AND HIGH-FREQUENCY GENERATOR

152

102009917

SUBSTRATE LIQUID PROCESSING APPARATUS

153

102009923

PROCESSING METHOD OF SILICON NITRIDE FILM AND FORMING METHOD OF SILICON   NITRIDE FILM

154

102010095

PEELING DEVICE, PEELING SYSTEM, PEELING METHOD, AND COMPUTER RECORDING   MEDIUM

155

102010122

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD OF   SILICON-CONTAINING FILM

156

102010633

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

157

102011519

NOZZLE CLEANING APPARATUS, COATING APPARATUS, NOZZLE CLEANING METHOD,   COATING METHOD, AND COMPUTER STORAGE MEDIUM

158

102011520

COATING APPARATUS AND COATING METHOD

159

102011522

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

160

102011527

DEVELOPING APPARATUS, DEVELOPING METHOD AND STORAGE MEDIUM

161

102011538

WIPING PAD, NOZZLE MAINTENANCE DEVICE USING PAD, AND COATING PROCESSING   DEVICE

162

102011563

SUBSTRATE MOUNTING METHOD AND SUBSTRATE MOUNTING DEVICE

163

102011567

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

164

102012225

PLASMA PROCESSING APPARATUS

165

102012355

SUBSTRATE PROCESSING METHOD, STORAGE MEIDUM STORING COMPUTER PROGRAM FOR   IMPLEMENTING SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

166

102012608

WAFER INSPECTION METHOD AND WAFER INSPECTION DEVICE

167

102013016

VERTICAL HEAT TREATMENT APPARATUS

168

102013029

PLASMA ETCHING METHOD AND PLASMA ETCHING SYSTEM

169

102013070

PLASMA PROCESSING APPARATUS

170

102013085

WAFER INSPECTION DEVICE AND WAFER INSPECTION METHOD

171

102013484

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND PROGRAM

172

102015679

TEMPERATURE CONTROL METHOD, CONTROL DEVICE, AND PLASMA TREATMENT DEVICE

173

102015693

VERTICAL HEAT TREATMENT APPARATUS

174

102015697

SUBSTRATE PROCESSING APPARATUS

175

102015698

PLASMA FILM-FORMING APPARATUS AND SUBSTRATE PEDESTAL

176

102015875

ETCHING METHOD AND ETCHING APPARATUS

177

102015876

PLASMA PROCESSING METHOD AND PLASMA PROCESSING DEVICE

178

102016769

FILM FORMING METHOD, COMPUTER-READABLE RECORDING MEDIUM AND FILM FORMING   APPARATUS

179

102016773

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

180

102016789

SUPPORT APPARATUS FOR PLASMA ADJUSTMENT, METHOD FOR ADJUSTING PLASMA,   AND STORAGE MEDIUM

181

102017935

FILM FORMING METHOD, FILM FORMING APPARATUS, AND STORAGE MEDIUM

182

102017937

FILM FORMING APPARATUS, FILM FORMING METHOD, AND STORAGE MEDIUM

183

102017944

MANUFACTURING METHOD OF NICKEL WIRING

184

102017962

SHOWER HEAD AND DEPOSITION SYSTEM

185

102018432

FILM FORMING METHOD

186

102019524

PROCESSING LIQUID SUPPLY DEVICE, PROCESSING LIQUID SUPPLY METHOD AND   STORAGE MEDIUM

187

102019573

SUBSTRATE PLACING TABLE

188

102020704

FILM FORMING APPARATUS

189

102021168

FILM FORMING METHOD AND FILM FORMING APPARATUS

190

102021169

SUBSTRATE PROCESSING APPARATUS

191

102021171

FILM FORMING APPARATUS

192

102021570

PLASMA PROCESSING APPARATUS AND HEATER TEMPERATURE CONTROL METHOD

193

102022153

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

194

102022158

SELF-ALIGNED SPACER FORMATION

195

102022762

PLASMA PROCESSING METHOD

196

102022764

LIQUID DROPLET EJECTION APPARATUS AND EJECTION INSPECTION METHOD

197

102023434

FILM FORMING METHOD, FILM FORMING SYSTEM AND SURFACE PROCESSING METHOD

198

102023784

METHOD OF ETCHING SILICON NITRIDE FILMS

199

102023817

REDUCED-PRESSURE DRYING APPARATUS

200

102023828

TREATMENT DEVICE AND TREATMENT METHOD, AND GAS CLUSTER GENERATION DEVICE   AND GENERATION METHOD

201

102024386

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD

202

102024973

PLASMA PROCESSING APPARATUS AND HIGH FREQUENCY GENERATOR

203

102024983

FILM FORMING METHOD

204

102025457

UPPER ELECTRODE AND PLASMA PROCESSING APPARATUS

205

102025945

APPARATUS FOR PREVENTING LOOSENESS OF BOLT, ATTACHING METHOD AND   ATTACHING JIG THEREFOR, FLUID CONTROL DEVICE AND SUBSTRATE PROCESSING   APPARATUS

206

102025981

METHOD FOR BOTTOM-UP FORMATION OF A FILM IN A RECESSED FEATURE

207

102027675

PLASMA PROCESSING APPARATUS

208

102027687

HIGH FREQUENCY GENERATOR AND PLASMA PROCESSING APPARATUS

209

102028237

SUBSTRATE PROCESSING APPARATUS

210

102029538

FILM FORMING APPARATUS AND FILM FORMING MEHTOD

211

102029578

PLASMA PROCESSING APPARATUS AND CONTROL METHOD

212

102029579

PLASMA PROCESSING APPARATUS AND CONTROL METHOD

213

102030214

EXHAUST SYSTEM

214

102030223

FILM FORMING APPARATUS, METHOD OF FORMING LOW-PERMITTIVITY FILM, SiCO   FILM, AND DAMASCENE INTERCONNECT STRUCTURE

215

102030232

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

216

102030882

FILM-FORMING PROCESSING APPARATUS, FILM-FORMING METHOD, AND STORAGE   MEDIUM

217

102030893

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING METHOD, AND HOLE   INJECTION LAYER FORMING APPARATUS

218

102030945

LIQUID TREATMENT DEVICE AND LIQUID TREATMENT METHOD

219

102031198

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

220

102031405

SUBSTRATE PROCESSING APPARATUS

221

102032617

SUBSTRATE PROCESSING APPARATUS AND HEAT SHIELD PLATE

222

102033120

PLASMA-TREATMENT METHOD

223

102033180

PLASMA PROCESSING APPARATUS

224

102033807

SEPARATION CONTROL METHOD, AND CONTROL DEVICE FOR PLASMA PROCESSING   DEVICE

225

102033810

SYSTEM FOR MONITORING FAILURE OF SUBSTRATE PROCESSING APPARATUS, AND   METHOD FOR MONITORING FAILURE OF SUBSTRATE PROCESSING APPARATUS

226

102033826

PLASMA ETCHING METHOD

227

102033873

PLASMA PROCESSING APPARATUS

228

102033975

PLASMA PROCESSING METHOD, AND PLASMA PROCESSING DEVICE

229

102033979

ETCHING METHOD AND ETCHING APPARATUS

230

102034344

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER   STORAGE MEDIUM

231

102034556

PLASMA PROCESSING METHOD

232

102035890

ETCHING PROCESSING METHOD

233

102036462

FILM FORMING APPARATUS

234

102036944

METHOD OF CONTROLLING ADHERENCE OF MICROPARTICLES TO SUBSTRATE TO BE   PROCESSED, AND PROCESSING APPARATUS

235

102036950

PLASMA PROCESSING METHOD

236

102037542

SUBSTRATE MOUNTING TABLE AND PLASMA TREATMENT DEVICE

237

102038174

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

238

102038608

SEMICONDUCTOR DEVICE MANUFACTURING METHOD

239

102038617

PLASMA TREATMENT METHOD AND PLASMA TREATMENT DEVICE

240

102038642

PLASMA TREATMENT APPARATUS

241

102038649

POWER SUPPLY SYSTEM, PLASMA ETCHING DEVICE, AND PLASMA ETCHING METHOD

242

102038653

PERIODIC PATTERN FORMING METHOD AND DEVICE EMPLOYING SELF-ASSEMBLED   BLOCK COPOLYMER

243

102039248

SUBSTRATE PROCESSING APPARATUS AND METHOD

244

102039720

SUBSTRATE CLEANING METHOD AND STORAGE MEDIUM

245

102039759

GAS SUPPLY METHOD FOR SEMICONDUCTOR MANUFACTURING APPARATUS, GAS SUPPLY   SYSTEM AND SEMICONDUCTOR MANUFACTURING APPARATUS

246

102042588

SUBSTRATE PROCESSING METHOD

247

102044085

SUBSTRATE HOLDING METHOD, SUBSTRATE HOLDING DEVICE, PROCESSING METHOD   AND PROCESSING DEVICE

248

102044097

PLASMA PROCESSING APPARATUS

249

102045091

BONDING APPARATUS, BONDING SYSTEM AND BONDING METHOD

250

102046193

PLASMA ETCHING METHOD AND PLASMA ETCHING APPARATUS

251

102046226

FILM FORMING APPARATUS AND FILM FORMING METHOD

252

102046705

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

253

102047160

PLASMA FILM-FORMING METHOD AND PLASMA FILM-FORMING APPARATUS

254

102047310

PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE MEDIUM   THEREFOR

255

102047591

METHOD OF FORMING MULTI-LAYERED PASSIVATION AND APPARATUS OF FORMING   MULTI-LAYERED PASSIVATION

256

102049117

SUBSTRATE PROCESSING APPARATUS

257

102049146

PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND SUBSTRATE MOUNTING   TABLE

258

102049431

SUBSTRATE CLEANING DEVICE, SUBSTRATE CLEANING SYSTEM, SUBSTRATE CLEANING   METHOD AND STORAGE MEDIUM

259

102050107

HEAT PROCESSING APPARATUS, COOLING METHOD FOR HEAT PROCESSING PLATE, AND   COMPUTER STORAGE MEDIUM

260

102050631

METHOD AND PROCESSING APPARATUS FOR PERFORMING PRE-TREATMENT TO FORM   COPPER WIRING IN RECESS FORMED IN SUBSTRATE

261

102051149

PROCESS MONITORING DEVICE AND PROCESS MONITORING METHOD IN SEMICONDUCTOR   MANUFACTURING APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

262

102051185

GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD

263

102051190

GAS TREATMENT APPARATUS AND GAS TREATMENT METHOD

264

102052131

PLATING DEVICE, PLATING METHOD, AND STORAGE MEDIUM

265

102052216

LIQUID PROCESSING APPARATUS AND COMPUTER-READABLE RECORD MEDIUM   RECORDING PROGRAM FOR LIQUID PROCESSING APPARATUS

266

102053489

CLAMP APPARATUS, SUBSTRATE CARRY-IN/OUT APPARATUS USING THE SAME, AND   SUBSTRATE PROCESSING APPARATUS

267

102053517

METHOD OF MANUFACTURING RUTHENIUM WIRING

268

102053778

METHOD FOR SUPPLYING TEMPERATURE-REGULATED FLUID TO TEMPERATURE CONTROL   SYSTEM, AND STORAGE MEDIUM

269

102053792

PLASMA PROCESSING APPARATUS

270

102054017

DRY METAL ETCHING METHOD

271

102055473

HYDROPHOBIZATION TREATMENT DEVICE, HYDROPHOBIZATION TREATMENT METHOD,   AND HYDROPHOBIZATION-TREATMENT RECORDING MEDIUM

272

102056751

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

273

102058264

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

274

102058592

ETCHING METHOD

275

102058763

ENERGY CONSUMPTION MONITORING SYSTEM FOR SUBSTRATE TREATMENT DEVICE AND   ENERGY CONSUMPTION MONITORING METHOD FOR SUBSTRATE TREATMENT DEVICE

276

102060059

DRYING APPARATUS

277

102060223

MULTI-FREQUENCY POWER MODULATION FOR ETCHING HIGH ASPECT RATIO FEATURES

278

102061373

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MAINTAINING SAME

279

102061415

PLASMA PROCESSING APPARATUS AND GAS SHOWER HEAD

280

102061969

SUBSTRATE PROCESSING APPARATUS

281

102062947

FILM FORMATION APPARATUS

282

102062948

FILM FORMATION APPARATUS