1

半导体制造

265

5.8%

2

电气元件和结构部件

31

0.5%

3

光电辐射测量与核物理

19

0.5%

4

半导体零配件

4

0.4%

5

光学和摄影

28

0.4%

6

纺织、造纸和印刷

10

0.3%

7

电热与等离子体

10

0.3%

8

包装和储运

11

0.2%

9

分离和混合加工作业

10

0.1%

10

材料化学与纳米

6

0.1%

11

半导体元件

5

0.1%

12

成型加工作业

8

0.1%

13

一般车辆

4

0.1%

14

材料测试

2

0.1%

15

图像处理

1

0.1%

16

化工

3

0.0%

17

照明与制冷制热

2

0.0%

18

电池

1

0.0%

19

物理测量

1

0.0%

20

建筑和采矿

2

0.0%

1

101936427

Transferring guide assembly and Apparatus for transferring a substrate   having the same

2

101937333

APPARATUS AND METHOD FOR TREATING SUBSTRATE

3

101937334

Apparatus for treating substrate

4

101937349

Apparatus for Supplying Droplet Formation and Apparatus for Droplet   Formation having the same

5

101938350

SUBSTRATE TREATING APPARATUS PERFORMING AND VENTILATION METHOD USING THE   SAME

6

101939352

Magnetic levitation transfer apparatus

7

101939353

Method for transferring substrate

8

101939661

APPARATUS AND METHOD FOR TREATING SUBSTRATE

9

101939844

Apparatus and method of testing a substrate

10

101940744

Apparatus for treating substrate

11

101941488

Shower head unit and Apparatus for treating substrate with the unit

12

101941489

APPARATUS AND METHOD FOR HEATING A SUBSTRATE

13

101941490

APPARATUS AND METHOD FOR TREATING A SUBSTRATE

14

101943729

Via hole filling method and apparatus

15

101945460

SUBSTRATE TREATING APPARATUS, SUBSTRATE SUPPORTING UNIT AND UNDERTAKING   AND DELIVERY SUBSTRATE METHOD

16

101945461

SUBSTRATE TREATING APPARATUS

17

101949406

APPARATUS FOR PROCESSING SUBSTRATE

18

101949407

RUDDER FORCE MEASURING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING   THE SAME

19

101949408

Apparatus for treating substrate

20

101949409

Substrate treating apparatus and substrate treating method

21

101951369

ELECTROSTATIC CHUCK AND SUBSTRATE TREATING APPARATUS INCLUDING THE CHUCK

22

101951373

Apparatus for treatinf substrate and Exhausting method

23

101951375

APPARATUS AND METHOD FOR TREATING SUBSTRATE

24

101955575

Apparatus and Method for treating substrate

25

101955580

APPARATUS FOR TREATING SUBSTRATE

26

101955584

APPARATUS FOR TREATING SUBSTRATE

27

101955590

UNIT FOR SUPPLYING LIQUID AND APPARATUS FOR TREATING A SUBSTRATE WITH   THE UNIT

28

101955592

Apparatus and method for treating a substrate

29

101955597

APPARATUS AND METHOD FOR MANUFACTURING CLEANING SOLUTION

30

101955598

APPARATUS AND METHOD FDR TREATING SUBSTRATES

31

101955604

CHEMICAL SUPPLYING UNIT AND APPARATUS FOR TREATING SUBSTRATES

32

101955608

CHEMICAL SUPPLYING UNIT AND APPARATUS FDR TREATING SUBSTRATES WITH THE   UNIT

33

101955611

Substrate treating apparatus and cleaning method for substrate treating apparatus

34

101957959

Method and apparatus for ejecting a die

35

101957960

Magnetic levitation transfer apparatus

36

101957961

Socket board assembly

37

101957967

Apparstus for supplying cans

38

101958636

Apparatus for supporting substrate, System for treating substrate, and   Method for treating substrate

39

101958637

Substrate treating apparatus and substrate treating method

40

101958638

APPARATUS FOR TREATING SUBSTRATE

41

101958639

Apparatus and Method for treating substrate

42

101958640

APPARATUS FOR TREATING SUBSTRATE

43

101958641

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR EXHAUSTING HOME PORT

44

101958642

Apparatus for treating a substrate

45

101958643

APPARATUS FOR TREATING SUBSTRATE

46

101958740

NOZZLE UNIT AND SUBSTRATE TREATING APPARATUS HAVING THE SAME

47

101960272

Apparatus and Method for dispensing photoresist

48

101960273

Printing Method

49

101960274

Apparatus for Laminating

50

101960944

APPARATUS AND METHOD FOR TREATING SUBSTRATE

51

101961326

Method and Apparatus for cleaning component of apparatus for treating   substrate

52

101962859

Substrate treating apparatus and substrate treating method

53

101964654

Substrate treating apparatus and temperature sensor

54

101964655

Apparatus and Method for treating substrate

55

101964656

Apparatus for Processing Substrate

56

101964964

SEMICONDUCTOR MANUFAFTURING EQUIPMENTS WITH AUTOMATIC TEACHING APPARATUS   OF WAFER TRANSFER ROBOT AND METHOD FOR TEACHING OF THE SAME

57

101964974

APPARATUS AND METHOD FOR TREATING SUBSTRATE

58

101965297

The nozzle and Apparatus for treating substrate with the nozzle

59

101965349

Apparatus and Method for treating substrate

60

101965573

APPARATUS FOR SUPPLYING POWER, AND APPARATUS FOR TREATING SUBSTRATE   COMPRISING THE SAME

61

101966793

SUBSTRATE SUPPORTING UNIT AND SUBSTRATE PROCESSING APPARATUS COMPRISING   THE SAME

62

101966797

APPARATUS FOR TREATING SUBSTRATE

63

101966800

Apparatus and Method for treating substrate

64

101966804

Apparatus for treating substrate

65

101966805

Nozzle and Apparatus for treating substrate with the nozzle

66

101966806

Substrate treating apparatus and substrate treating method

67

101966807

APPARATUS FOR TREATING SUBSTRATE

68

101966808

Anhydrous substrate cleaning compositions, substrate cleaning method and   substrate treating apparatus

69

101966809

Substrate polishing apparatus and substrate polishing method

70

101966810

Substrate treating apparatus and substrate treating method

71

101966812

Apparatus and Method for treating a substrate

72

101966813

MEASURING APPARATUS AND MEASURING METHOD

73

101966814

Unit for supplying treating liquid and Apparatus for treating substrate

74

101968139

DISCHARGING HEAD CLEANIG METHOD

75

101968486

APPARATUS AND METHOD FOR TREATING SUBSTRATE

76

101968488

Apparatus and Method for treating substrate

77

101968536

CHEMICAL SUPPLYING UNIT APPARATUS FOR TREATING SUBSTRATES WITH THE UNIT

78

101969077

PLASMA ANTENNA AND APPARATUS FOR TREATING SUBSTRATES USING THE SAME

79

101969361

Apparatus and Method for manufacturing integrated circuit device

80

101970183

SUBSTRATE SUPPORTING UNIT, SUBSTRATE TREATING APPARATUS AND SUBSTRATE   SUPPORTING METHOD

81

101970981

Support unit, Apparatus and method for treating a substrate

82

101971989

Apparatus for transferring a substrate

83

101972930

APPARATUS FDR TREATING SUBSTRATES

84

101974185

Magnetic levitation transfer apparatus and method

85

101974417

SUBSTRATE TREATING APPARATUS AND METHOD FOR CARRYING IN SUBSTRATE

86

101974419

WINDOW UNIT, APPARATUS FOR TREATING SUBSTRATE COMPRISING THE SAME,   METHOD FOR TREATING SUBSTRATE, AND MANUFACTURING METHOD OF THE SAME

87

101974420

Apparatus and Method for treating substrate

88

101974421

Manufacturing method of edge ring and recycling method of edge ring

89

101974422

Apparatus and Method for treating substrate

90

101977627

Apparatus for dispensing photoresist

91

101977752

Apparatus and Method for treating a substrate

92

101977755

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORT METHOD

93

101977756

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR SUPPLYING CHEMICAL THEREOF

94

101977757

Apparatus for treating substrate

95

101977759

Exhaust assembly and Apparatus for treating substrate

96

101977771

Apparatus for treating substrate

97

101979597

APPARATUS AND METHOD FOR TREATING SUBSTRATE

98

101979599

APPARATUS AND METHOD FOR TREATING SUBSTRATE COMPRISING THE SAME

99

101979601

APPARATUS AND METHOD FOR TREATING SUBSTRATE

100

101979602

APPARATUS AND METHOD FOR TREATING SUBSTRATE

101

101979603

Apparatus for treating substrate

102

101979604

Method for treating substrate

103

101979606

Unit for supplying chemical, Apparatus for treating substrate, and   Method for removal bubble

104

101980203

SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

105

101980558

Apparatus of manufacturing Integrated circuit

106

101980589

Substrate treating apparatus and substrate treating method

107

101980590

Apparatus for treating substrate

108

101980729

Substrate treating apparatus and substrate treating method

109

101980849

Apparatus for inspecting display cells

110

101981559

Apparatus for treating substrate with the unit

111

101981954

APPRATUS FOR TREATING SUBSTRATE

112

101982832

Buffer unit and Apparatus for treating a substrate with the unit

113

101985751

Apparatus for supporting substrate, System for treating substrate, and   Method for treating substrate

114

101985753

HEATING UNIT

115

101985754

AIR CONDITIONER AND APPARATUS FOR TREATING SUBSTRATE THE SAME

116

101985755

Apparatus and Method for treating a substrate

117

101985756

Apparatus and Method for treating substrate

118

101985763

Apparatus for treating substrate

119

101985764

AIR CONDITIONER AND APPARATUS FOR TREATING SUBSTRATE THE SAME

120

101987451

SUBSTRATE SUPPORTING MEMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING   THE SAME

121

101987810

Apparatus for treating substrate

122

101987949

SUBSTRATE TREATING APPARATUS AND SUBSTARTE TERATHING METHOD

123

101987954

Electrolyzer, Substrate treating apparatus and Substrate treating method

124

101987957

Substrate treating apparatus and substrate treating method

125

101987958

Active mass damper and mass damping system

126

101987959

Apparatus and Method for treating substrate

127

101991497

Magnetic levitation transfer apparatus

128

101991799

Supporting Unit and Apparatus for treating substrate with the unit

129

101991800

APPARATUS FOR TREATING SUBSTRATE

130

101991801

apparatus for substrate processing

131

101992825

aging wafer change method of Apparatus for Processing Substrate

132

101993727

Method for treating substrate

133

101993730

APPARATUS AND METHOD FDR CLEANING SUBSTRATES

134

101993732

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR SETTING NOZZLE POSITION

135

101993788

SUBSTRATE PROCESSING APPARATUS AND METHOD

136

101994419

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MONITORING A SUBSTRATE   PROCESSING APPARATUS

137

101994420

Apparatus and Method for treating substrate

138

101994422

Apparatus and Method for treating substrate

139

101994423

Substrate treating apparatus

140

101994425

Apparatus and Method for treating substrate

141

101995760

APPARATUS AND METHOD FOR TREATING SUBSTRATE

142

101995762

Substrate treating apparatus and substrate treating method

143

101998131

Driving apparatus in an integrated circuit manufacturing and Driving   method using the same

144

101999834

Test Apparatus

145

102000010

Apparatus and method for treating substrate

146

102000011

Apparatus and method for treating substrate

147

102000012

FOCUS RING AND APPARATUS FOR TREATING SUBSTRATE COMPRISING THE SAME

148

102000013

APPARATUS AND METHOD FOR TREATING SUBSTRATES

149

102000015

Substrate treating apparatus and substrate treating method

150

102000016

SUBSTRATE TREATING APPARATUS, SUBSTRATE SUPPORT AND MAKING METHOD

151

102000017

Substrate treating apparatus and substrate treating method

152

102000019

Unit for supplying liquid, Apparatus for treating a substrate, and   Method for treating a substrate

153

102000021

SUBSTRATE SUPPORTING UNIT, HEAT TREATMENT UNIT AND SUBSTRATE TREATING   APPARATUS INCLUDING THE SAME

154

102000022

Substrate treating apparatus and substrate treating method

155

102000023

Substrate treating apparatus

156

102000024

Inspecting method and Apparatus for treating a substrate

157

102000025

Substrate treating apparatus

158

102000026

Apparatus and Method for treating substrate

159

102000079

DIE BONDING APPARATUS

160

102000080

Chuck module supporting substrate and apparatus for testing   semiconductor devices having the same

161

102000081

Die stage unit for testing die and die binding apparatus having the same

162

102000639

Dust collecting apparatus and Laser processing apparatus having the same

163

102000751

Swing type door provided with process chamber in a IC apparatus

164

102001467

Test handler and Method for testing using the same

165

102001468

Apparatus for electrical contacting in semiconductor device testing

166

102005275

Magnetic levitation transfer apparatus

167

102006675

Apparatus and Method for manufacturing integrated circuit device

168

102007393

SUBSTRATE TREATING APPARATUS AND TEACHING METHOD

169

102007394

UNIT FOR GENERATING PLASMA AND APPARATUS AND METHOD FOR TREATING   SUBSTRATE INCLUDING THE SAME

170

102008305

Substrate treating apparatus and substrate treating method

171

102008310

Apparatus for treating substrate

172

102008311

Substrate treating apparatus and substrate treating method

173

102008483

Apparatus for treating substrate and the operating method thereof

174

102009922

Apparatus for ejecting a die

175

102009991

Apparatus for transferring semiconductor package

176

102010261

Apparatus and Method for treating a substrate

177

102010262

APPARATUS AND METHOD FOR MANUFACTURING CLEANING SOLUTION

178

102010263

Apparatus and Method for treating substrate

179

102010264

APPARATUS FOR TREATING SUBSTRATE, AND APPARATUS AND METHOD FOR   MONITORING PROCESS FLUID OF THE SAME

180

102010265

APPARATUS AND METHOD FOR TREATING SUBSTRATES

181

102010266

Apparatus for treating substrate

182

102010267

Substrate treating apparatus and substrate treating method

183

102012206

Apparatus and Method for treating substrate

184

102012207

Liquid supplying unit and Apparatus for treating substrate with the unit

185

102012208

Method for inspecting a substrate and Apparatus for treating a substrate

186

102012209

Substrate treating apparatus and substrate treating method

187

102013236

Printing Method by using Inkjet Head Unit

188

102013668

APPARATUS FOR TREATING SUBSTRATE AND TEST METHOD

189

102013669

Apparatus and Method for treating substrate

190

102013670

Substrate treating apparatus and substrate treating method

191

102013671

Substrate treating apparatus and processing liquid nozzle inspecting   method

192

102015381

PLASMA GENERATING DEVICE AND APPARATUS FOR TREATING SUBSTRATE COMPRISING   THE SAME

193

102017099

Overhead hoist transport with low vibration type guide coupling member

194

102017100

Overhead hoist transport with low vibration type guide coupling member

195

102017834

Apparatus for Processing a Substrate and Method for Processing a   Substrate

196

102019779

SUBSTRATE TREATING APPARATUS

197

102020148

INKJET PROCESS APPARATUS

198

102020227

Apparatus and method for transferring carrier

199

102020230

Substrate treating apparatus, process fluid treating apparatus and ozone   decomposition method

200

102020232

Tower lift

201

102020234

Raceway unit and OHT having the raceway unit

202

102020235

Apparatus of cleaning for semiconductor transfer device

203

102020236

Apparatus for attaching panels to each other

204

102020816

Apparatus for treating substrate

205

102021807

Printing Method by using Inkjet Head Unit

206

102022953

unit for supplying Chemical , Apparatus and Method for treating   substrate with the unit

207

102022954

Substrate treating facility and chemical supply apparatus

208

102024037

APPARATUS AND METHOD FOR TREATING SUBSTRATE

209

102024615

Apparatus for Cleaning Droplet in Inkjet Head and Method for Cleaning   Droplet in Inkjet

210

102026831

Apparatus for treating substrate using plasma

211

102026832

APPARATUS AND METHOD FOR TREATING SUBSTRATE

212

102030038

Apparatus for Processing Substrate

213

102030050

Apparatus for treating substrate

214

102030051

APPARATUS AND METHOD FOR TRANSFERING SUBSTRATE

215

102030056

Method for cleaning a chamber, Method for treating a substrate, and   Apparatus for treating a substrate

216

102030062

Apparatus for treating substrate

217

102030068

Substrate treating apparatus and substrate treating method

218

102030470

TEST METHOD AND APPARATUS FOR TREATING SUBSTRATE

219

102030471

Lift pin unit and Unit for supporting substrate

220

102030729

METHOD FOR MANUFACTURING HAND AND METHOD FOR TREATING SUBSTRATE

221

102030749

Cleaning apparatus in an integrated circuit manufacturing

222

102031728

APPARATUS FDR TREATING SUBSTRATES

223

102037168

SUBSTRATE TREATING APPARAUS AND SUBSTRATE SUPPORTING UNIT

224

102037169

Apparatus for treating substrate

225

102037170

APPARATUS AND METHOD FOR VERIFYING RF UNIT OF SUBSTRATE TREATMENT   APPARATUS

226

102037802

Apparatus for treating substrate

227

102037900

APPARATUS AND METHOD FOR TREATING SUBSTRATES

228

102037901

Unit for supplying chemical and Apparatus for treating substrate

229

102037902

APPARATUS AND METHOD FOR TREATING SUBSTRATE

230

102037904

Substrate treating apparatus and substrate treating method

231

102037905

Apparatus and Method for treating substrate

232

102037906

Substrate treating apparatus and substrate treating method

233

102037907

Substrate treating apparatus and substrate treating method

234

102037908

SUBSTRATE HEATING UNIT AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

235

102037909

APPARATUS FOR TREATING SUBSTRATE

236

102037910

Coating apparatus and coating method

237

102037912

Inspecting method and Apparatus for treating a substrate

238

102037914

SUBSTRATE TREATING APPARATUS

239

102037915

Apparatus for treating substrate

240

102037916

Apparatus for treating substrate

241

102037917

Substrate treating apparatus and substrate treating method

242

102037918

substrate processing method and substrate processing apparatus

243

102037919

Apparatus and Method for treating substrate

244

102037920

Heating unit

245

102037921

Apparatus and Method for treating substrate

246

102037922

APPARATUS FOR TREATING SUBSTRATES

247

102037923

Apparatus for picking LED package

248

102037924

Test tray for using test handler

249

102037925

Apparatus for contacting semiconductor device in a test handler

250

102037926

Apparatus for controlling temperature in semiconductor package   inspection

251

102037948

Die bonding method and apparatus

252

102037950

Wafer supply module and die bonding apparatus including the same

253

102037952

Loader port apparatus

254

102037955

Vehicle and Overhead Hoist transport device having the vehicle

255

102037961

Temperature controlling module of DSA board and apparatus for testing   semiconductor devices having the same

256

102037964

Method of bonding a die

257

102037967

Die bonding method

258

102037972

Die bonding method

259

102037974

Tester manipulating apparatus

260

102037975

Tray elevator

261

102039968

APPARATUS FOR TREATING SUBSTRATE, UNIT FOR SPPORTING SUBSTRATE AND   METHOD FOR MANUFACTURING SUBSTRATE SPPORTING UNIT

262

102039969

SUPPORTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME

263

102040246

Apparatus and Method for treating substrate

264

102040954

Apparatus for treating substrate

265

102041182

Method for testing semiconductor package

266

102041183

Apparatus and Method for inspecting semiconductor package

267

102041184

Test Hander and Method for operating thereof

268

102041185

Apparatus for transferring substrate, Method for transferring substrate,   and Apparatus for processing substrate having the same

269

102041308

Apparatus and Method for treating substrate

270

102041309

METHOD FOR WASHING MASK

271

102041310

APPARATUS FOR TREATING A SUBSTRATE AND METHOD FOR DETERMINING THE STATE   THE POSE OF A SUBSTRATE

272

102041311

liquid mxing supply method for reflecting amount used

273

102041312

APPARATUS FDR DRYING SUBSTRATES

274

102041314

TRANSFER UNIT

275

102041316

APPARATUS AND METHOD FOR TREATING SUBSTRATE

276

102041318

Method and Apparatus for treating substrate

277

102041319

UNIT FOR CONTROLING EXHAUST, APPARATUS AND METHOD FOR TREATING SUBSTRATE   USING THE SAME

278

102041321

APPARATUS AND METHOD FOR TREATING SUBSTRATE

279

102041338

METHOD AND APPARATUS FOR SUBSTRATE PROCESSING

280

102042345

Rotary magnetic flowmeter

281

102042362

A SUBSTRATE PROCESSING APPARATUS

282

102042765

Method for dispensing droplet and Apparatus for dispensing droplet

283

102042766

Apparatus for transferring substrate, Method for transferring substrate,   and Apparatus for processing substrate having the same

284

102042789

Method for treating a substrate and an apparatus for treating a   substrate

285

102044389

SUBSTRATE SUPPORTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE   UNIT

286

102046795

Apparatus and Method for remote controlling in semiconductor device   fabricating

287

102046869

Member for suppliyng a substrate, Buffer unit, and Apparatus for   treating a substrate

288

102046870

Liquid supplying unit and Apparatus for treating substrate with the unit

289

102046871

Substrate treating apparatus and substrate treating method

290

102046872

Apparatus and Method for treating substrate

291

102046973

METHOD AND APPARATUS FOR SUBSTRATE CLEANING

292

102047035

Die bonding apparatus

293

102047894

Buffer unit and Apparatus for treating a substrate with the unit

294

102047895

APPARATUS AND METHOD FOR MONITORING SUBSTRATE TREATMENT PROCESS

295

102047896

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

296

102050820

SUBSTRATE SUPPORTING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE   UNIT

297

102050822

SUBSTRATE TREATING APPARATUS

298

102051361

Apparatus and Method of manufacturing Integrated circuit

299

102051362

Apparatus for developing photoresist in an integrated circuit   fabricating

300

102053959

Raceway device

301

102054221

Apparatus for transferring substrate and Apparatus for treating   substrate with it

302

102054222

SUBSTRATE HEATING UNIT

303

102056855

Method and Apparatus for treating substrate

304

102056857

shuttle and Apparatus for treating substrate with the shuttle

305

102058930

Automatic continuous test system and method

306

102061004

Substrate treating apparatus and substrate treating method

307

102062643

Apparatus for processing substrate and the operating method thereof

308

102062750

Apparatus for manufacturing integrated circuit device

309

102063108

APPARATUS AND METHOD FOR TREATING SUBSTRATE

310

102063109

Substrate treating apparatus and substrate treating method

311

102063110

INTERFACE CONTROLLING DEVICE AND METHOD FOR MONITORING DRIVING VOLTAGE   THEREBY

312

102063112

Chemical discharging unit and Apparatus for treating substrate with the   unit

313

102063319

SPIN HEAD, SUBSTRATE TREATING APPARATUS INCLUDING THE SPIN HEAD AND   SUBSTRATE TREATING METHOD FOR USING THE APPARATUS

314

102063320

Apparatus and Method for treating substrate

315

102063322

Apparatus and Method for treating a substrate

316

102063323

Unit supplying chemical, Apparatus and Method for treating substrate   with the unit