关注：

   1) 知名的离子注入模拟程序

   2) 热脱附谱模拟程序

SRIM

http://www.oecd-nea.org/tools/abstract/detail/nea-0919/

http://www.srim.org/SRIM/Tutorials/Tutorials.htm

https://en.wikipedia.org/wiki/Stopping_and_Range_of_Ions_in_Matter

SRIM是模拟。它采用Monte Carlo方法，利用计算机模拟跟踪一大批入射粒子的运动。粒子的位置、能量损失以及次级粒子的各种参数都在整个跟踪过程中存储下来，最后得到。该软件可以选择特定的入射离子及靶材种类，并可设置合适的加速电压[53]。可以算不同粒子，以不同的能量，从不同的位置，以不同的角度入射到靶中的情况。

3. DESCRIPTION OF PROGRAM OR FUNCTION

SRIM is a group of programs which calculate the stopping and range of ions (10 eV - 2 GeV/amu) into matter.
TRIM (the Transport of Ions in Matter) is the most comprehensive program included. 

TRIM will accept complex targets made of compound materials with up to eight layers, each of different materials. It will calculate both the final 3D distribution of the ions and also all kinetic phenomena associated with the ion's energy loss: target damage, sputtering, ionization, and phonon production. All target atom cascades in the target are followed in detail.
It can be used for physics of recoil cascades, physics of sputtering, the stopping of ions in compounds and stopping powers for ions in gases; This included radiation damage from neutron, electrons and photons.

SRIM-2008

2008.03: Made changes to sputtering of targets Z=13 to21 to omit discontinuity in treatment; Added Help buttons to TRIM plots, and included additional comments; Changed ordinate units for Ion/Recoil distributions to same as for Ions.
2008.02: Added Ordinate scales to ion trajectory plots; Removed bug in calc. for gas layers within solid targets; Added Chapters 8 > 9 from SRIM textbook to SRIM Help.
2008.01: No changes to basic calculation of SRIM-2003; Many small bugs have been corrected.
This version of SRIM is consistent with the new SRIM Textbook (2008). Allows changes of Ion/Energy/Angle during calculation and added to previous TRIM results.

中文教程：

https://max.book118.com/html/2017/0601/111001534.shtm